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NACK S12: Fabricating a MEMS Pressure Sensor – You Can Do This!

2021.10.08 Matthias Pleil , University of New Mexico This presentation is part of the NACK - Nano-Educators Topical Seminar Series and can be found at: https://nanohub.org/resources/35662 Information on the NACK Network can be found at: https://www.cneu.psu.edu/ and https://nano4me.org Table of Contents: 00:00 Fabricating a MEMS Pressure Sensor – You Can Do This! 01:49 What are MEMS Pressure Sensors? 03:07 Why do we care? 05:24 Who Makes These? 06:15 Pressure Sensor Application 08:24 A Cool App for your phone Check out your pressure sensor! 10:34 Pressure Sensor How it Works 12:10 MTTC Pressure Sensor Process Overview 15:40 SCME/MTTC Pressure Sensor Process - Video 19:27 Backside Pattern (Chamber) – Hard Mask 21:04 Photolithography 23:32 Wafer Prep Deposition 24:38 Wafer Prep QDR/SRD Deposition 27:37 Coat 29:35 Expose 31:09 Develop 33:18 Microscope Inspection 34:07 Profilometer Inspection - DekTak 35:29 After Pattern, Before RIE Etch – Profiles 36:58 Program 38:56 After first 5min 39:56 After Etch before Resist Strip 41:27 Etch Inspect 42:03 Selectivity: What you want etched Vs Masking Material 43:15 Backside is now etched 43:44 Frontside Pattern – Dark or Bright Field? 45:42 Karl Suss MA6/BA6 45:46 Backside Alignment Microscopes 47:21 Pattern the Wheatstone Bridge 49:20 Alignment Details 49:51 Photolithography – Liftoff LOR5B 50:49 LOR5b Results - Inspect 51:57 Photolithography – Liftoff nLOF2070 53:45 nLOF2070 Results 54:17 So Far.... 55:02 Sputter – CrAu or NiCr 57:14 Load 57:43 Load Wafer in Load Lock 58:40 Sputter Wafer Stage and Target 59:14 Select 59:36 Metal on Photoresist 60:32 Liftoff 62:18 Inspect 62:25 What's Next? 62:28 Chamber Etch – Anisotropic Wet Etching of Silicon in KOH! 64:50 Singulation 65:43 Dicing 67:11 Probe 69:51 • • • • WWW.SCME-SUPPORT.ORG 72:02 NEW: URE - UNDERGRADUATE RESEARCH EXPERIENCE TARGETING 2YR TECHNICIAN STUDENTS WITH THEIR FACULTY! 75:44 MNTESIG COMMUNITY 79:25 Want to Give it a shot? 80:51 QUESTIONS? This presentation and related downloads can be found on nanoHUB.org at: https://nanohub.org/resources/36242